Electrostatic Nondestructive Evaluation and Testing to Detect Subsurface Defects

A system including a charge source and at least one voltage measurement device is disclosed. The charge source is for generating a charging environment to produce at least one of a voltage profile and a current on an area of dielectric material disposed over a conductive substrate. The area of dielectric material includes a first area containing a subsurface defect. The area of dielectric material also includes a second area that is defect-free. The at least one voltage measurement device is for outputting voltage measurements at different positions over the area of dielectric material. The voltage measurements over the first area differ from voltage measurements over the second area to define a voltage differential.