Suppression of Contamination Enhanced Laser Induced Damage to Optics using Fluorinated Coatings

Embodiments of the present invention provide systems and methods for inhibiting contamination enhanced laser induced damage (CELID) based on fluorinated self-assembled monolayers (F-SAMs) disposed on optics. For example, a coating for inhibiting CELID to an optic disposed in a sealed gas environment or vacuum may include an F-SAM that includes a fluorinated hydrocarbon tail group covalently bound to the optic by a head group. The coating may be formed by heating the optic and a liquid-phase precursor of the F-SAM to generate a gas-phase precursor, and exposing the heated optic to the gas-phase precursor for a period of time sufficient for the gas-phase precursor to coalesce at and covalently bond to the optic and form the F-SAM. The optic may include silica, and the F-SAM may include a siloxane group covalently bound to the silica.