Enhanced Molecular Fusion by Way of Laser Ultrasonic Excitation

Issue
 Date
Publication Date
Patent No.
9,303,309
Category
Device and Method

Under one aspect of the present invention, a method for enhancing mobility of an atomic or molecular species on a substrate may include exposing a first region of a substrate to an atomic or molecular species that forms a molecular bond with the substrate in the first region; directing a laser pulse to a second region of the substrate so as to generate an acoustic wave in the second region, the acoustic wave having spatial and temporal characteristics selected to alter the molecular bond; and transmitting the acoustic wave from the second region to the first region, the acoustic wave altering the molecular bond between the substrate and the atomic or molecular species to enhance mobility of the atomic or molecular species on the substrate in the first region.

Keywords: acoustic waves
International Class: C23C16/48, C23C14/22, C23C16/44