3D Patterning of Electrical Conduction Paths within Encapsulating Glass Ceramic Package

Issue
 Date
Publication Date
Patent No.
9,146,377
Category
Device and Method

A photostructurable ceramic is processed using photostructuring process steps for embedding devices within a photostructurable ceramic volume, the devices including chemical, mechanical, electronic, electromagnetic, optical, and acoustic devices, all made in part by creating device material within the ceramic or by disposing a device material through surface ports of the ceramic volume, with the devices being interconnected using internal connections and surface interfaces.

Keywords: MEMs, photostructured
International Class: B29D11/00, G02B7/00, G02B6/12