A stroboscopic imaging interferometer system includes an environmental chamber having a novel viewing window equipped with a rigidly integrated beam splitter and piezo actuated reference mirror for illuminating a device providing an object beam and reference mirror for providing a reference beam, upon the reflection of both beams, produces interference of the object beam by the reference beam for providing absolute phase observations of the device, that may be a MEMS device under test.
Keywords: interferometer, chamber, window
International Class: G01B9/02