A microfluidic device includes a substrate including multiple electro-hydraulic valves and/or electro-hydraulic pumps that each include a flow channel and one or more hydraulic control channels, actuators for controlling the electro-hydraulic valves and/or electro-hydraulic pumps, and a hydraulic pressure source operatively connected to the hydraulic control channels.
Keywords: valve, MEMs
International Class: F15C1/04, F16K31/02, F16K99/00, G10D7/00, H01L35/28, H01L35/30, H01L35/34, H01L37/00