An electro-hydraulic valve apparatus includes a flow channel, a hydraulic control channel defining an electro-hydraulic valve junction where the hydraulic control channel is adjacent to the flow channel, a flexible wall between the flow channel and the hydraulic control channel at the electro-hydraulic valve junction, and Peltier devices adjacent to the hydraulic control channel on opposite sides of the electro-hydraulic valve junction for controllably applying a hydraulic force against the flexible wall repositioning the flexible wall in relation to the flow channel to selectively close or open the electro-hydraulic valve apparatus.
Keywords: valve, MEMs
International Class: F15C1/04, F16K31/02, F16K99/00, G10D7/00, H01L35/28, H01L35/30, H01L35/34, H01L37/00