A Method Forming an Electrically Addressable Array Using Diode Isolation in a Single Thin Film

Issue
 Date
Publication Date
Patent No.
6,483,368
Category
Device or Machine

An address element, including a polysilicon resistor functioning as a heating element and blocking diode preventing sneak current to unaddressed elements, is selectively addressed using row and column address lines in a thin film structure having a minimum number of address lines and a minimum number of layers. The resistor heater element is well suited for igniting a fuel cell such as a fuel cell in an array of fuel cells disposed in a thin film microthruster.

Keywords: thin film, diode, array
International Class: F02K9/95, G11C8/10, G11C11/14, H01L27/01, H01L21/00