Fast Acting MEMS Valve

Issue
 Date
Publication Date
Patent No.
7,721,762
Category
Device or Machine

Embodiments of valve apparatuses are described.

Keywords: valve, MEMs
International Class: F15C1/04, F16K31/02, F16K99/00, G10D7/00, H01L35/28, H01L35/30, H01L35/34, H01L37/00